AMTECH SYSTEMS INC 10-Q

Accession 0000950153-03-001652

Filing information

CIK: 0000720500
Report date: 2003-06-30
Filing date: 2003-08-20
Form: 10-Q
Primary document: p68171e10vq.htm

Open primary document

View the filing document on sec.gov.

Open EDGAR directory

Inspect all files for this filing.

Complete submission file

Open the raw SEC submission text.